Invention Grant
- Patent Title: Method for producing semiconductor device and semiconductor device
- Patent Title (中): 半导体器件和半导体器件的制造方法
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Application No.: US14824633Application Date: 2015-08-12
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Publication No.: US09590098B2Publication Date: 2017-03-07
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE, LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE, LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/423 ; H01L29/51 ; H01L29/66 ; H01L29/40 ; H01L29/06 ; H01L21/3213 ; H01L21/321 ; H01L29/417 ; H01L21/311

Abstract:
A method for producing a semiconductor device includes a first step of forming a first insulating film around the fin-shaped semiconductor layer; a second step of forming a pillar-shaped semiconductor layer and a first dummy gate formed of a first polysilicon; a third step of forming a second dummy gate on sidewalls of the first dummy gate and the pillar-shaped semiconductor layer; a fourth step of forming a fifth insulating film left as a sidewall around the second dummy gate, forming a second diffusion layer in an upper portion of the fin-shaped semiconductor layer and a lower portion of the pillar-shaped semiconductor layer, and forming a metal-semiconductor compound on the second diffusion layer; a fifth step of forming a gate electrode and a gate line; and a sixth step of depositing a second gate insulating film around the pillar-shaped semiconductor layer and on the gate electrode and the gate line, removing a portion of the second gate insulating film on the gate line, depositing a second metal, etching back the second metal, removing the second gate insulating film on the pillar-shaped semiconductor layer, depositing a third metal, and etching a portion of the third metal and a portion of the second metal to form a first contact in which the second metal surrounds a sidewall of an upper portion of the pillar-shaped semiconductor layer, a second contact that connects an upper portion of the first contact and an upper portion of the pillar-shaped semiconductor layer, and a third contact made of the second metal and the third metal and formed on the gate line.
Public/Granted literature
- US20150349119A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE Public/Granted day:2015-12-03
Information query
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