Invention Grant
- Patent Title: Crystalline multilayer structure and semiconductor device
- Patent Title (中): 结晶多层结构和半导体器件
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Application No.: US14578072Application Date: 2014-12-19
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Publication No.: US09590050B2Publication Date: 2017-03-07
- Inventor: Toshimi Hitora , Masaya Oda , Akio Takatsuka
- Applicant: FLOSFIA INC.
- Applicant Address: JP Kyoto
- Assignee: FLOSFIA, INC.
- Current Assignee: FLOSFIA, INC.
- Current Assignee Address: JP Kyoto
- Agency: Christensen O'Connor Johnson Kindness PLLC
- Priority: JP2014-097241 20140508
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/22 ; H01L33/28 ; H01L21/02 ; H01L29/772 ; H01L29/778 ; H01L29/812 ; H01L29/04 ; H01L29/24 ; H01L29/66 ; H01L29/808 ; H01L29/872 ; H01L29/10 ; H01L33/26 ; H01L33/42

Abstract:
Provided is a crystalline multilayer structure having good semiconductor properties. In particular, the crystalline multilayer structure has good electrical properties as follows: the controllability of conductivity is good; and vertical conduction is possible. A crystalline multilayer structure includes a metal layer containing a uniaxially oriented metal as a major component and a semiconductor layer disposed directly on the metal layer or with another layer therebetween and containing a crystalline oxide semiconductor as a major component. The crystalline oxide semiconductor contains one or more metals selected from gallium, indium, and aluminum and is uniaxially oriented.
Public/Granted literature
- US20150325660A1 CRYSTALLINE MULTILAYER STRUCTURE AND SEMICONDUCTOR DEVICE Public/Granted day:2015-11-12
Information query
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