Invention Grant
- Patent Title: Graphene base transistor and method for making the same
- Patent Title (中): 石墨烯基晶体管及其制造方法
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Application No.: US14894090Application Date: 2014-05-23
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Publication No.: US09590045B2Publication Date: 2017-03-07
- Inventor: Andre Wolff , Wolfgang Mehr , Grzegorz Lupina , Jaroslaw Dabrowski , Gunther Lippert , Mindaugas Lukosius , Chafik Meliani , Christian Wenger
- Applicant: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ—INSTITUT FÜR INNOVATIVE MIKROELEKTRONIK
- Applicant Address: DE Frankfurt
- Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ—INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
- Current Assignee: IHP GMBH—INNOVATIONS FOR HIGH PERFORMANCE MICROELECTRONICS/LEIBNIZ—INSTITUT FUR INNOVATIVE MIKROELEKTRONIK
- Current Assignee Address: DE Frankfurt
- Agency: Ware, Fressola, Maguire & Barber LLP
- Priority: EP13169804 20130529
- International Application: PCT/EP2014/060735 WO 20140523
- International Announcement: WO2014/191328 WO 20141204
- Main IPC: H01L29/06
- IPC: H01L29/06 ; H01L29/16 ; H01L29/66 ; H01L29/737 ; H01L21/308 ; H01L29/08 ; H01L29/10 ; H01L29/417 ; H01L29/45 ; H01L29/73

Abstract:
A graphene base transistor comprises on a semiconductor substrate surface an emitter pillar and an emitter-contact pillar, which extend from a pillar foundation in a vertical direction. A dielectric filling layer laterally embeds the emitter pillar and the emitter-contact pillar above the pillar foundation. The dielectric filling layer has an upper surface that is flush with a top surface of the emitter pillar and with the at least one base-contact arm of a base-contact structure. A graphene base forms a contiguous layer between a top surface of the emitter pillar and a top surface of the base-contact arm. A collector stack and the base have the same lateral extension parallel to the substrate surface and perpendicular to those edges of the top surface of the emitter pillar and the base-contact arm that face each other.
Public/Granted literature
- US20160104778A1 GRAPHENE BASE TRANSISTOR AND METHOD FOR MAKING THE SAME Public/Granted day:2016-04-14
Information query
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