Invention Grant
- Patent Title: Pillar-shaped semiconductor memory device and method for producing the same
- Patent Title (中): 柱状半导体存储器件及其制造方法
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Application No.: US15221215Application Date: 2016-07-27
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Publication No.: US09589973B2Publication Date: 2017-03-07
- Inventor: Fujio Masuoka , Nozomu Harada
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Singapore
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD.
- Current Assignee Address: SG Singapore
- Agency: Brinks Gilson & Lione
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L27/112 ; H01L23/535 ; G11C16/14

Abstract:
A pillar-shaped semiconductor memory device includes a silicon pillar, and a tunnel insulating layer, a data charge storage insulating layer, a first interlayer insulating layer, and a first conductor layer, which surround an outer periphery of the silicon pillar in that order, and a second interlayer insulating layer that is in contact with an upper surface or a lower surface of the first conductor layer. A side surface of the second interlayer insulating layer facing a side surface of the first interlayer insulating layer is separated from the side surface of the first interlayer insulating layer with a distance therebetween, the distance being larger than a distance from the side surface of the first interlayer insulating layer to a side surface of the first conductor layer facing the side surface of the first interlayer insulating layer.
Public/Granted literature
- US20160336330A1 PILLAR-SHAPED SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR PRODUCING THE SAME Public/Granted day:2016-11-17
Information query
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