Invention Grant
- Patent Title: Methods of forming ruthenium conductive structures in a metallization layer
- Patent Title (中): 在金属化层中形成钌导电结构的方法
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Application No.: US15067365Application Date: 2016-03-11
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Publication No.: US09589836B1Publication Date: 2017-03-07
- Inventor: Xunyuan Zhang , Hoon Kim
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/768
- IPC: H01L21/768 ; H01L23/528 ; H01L23/532 ; H01L21/285

Abstract:
One illustrative method disclosed herein includes, among other things, forming a first conductive structure and a second conductive structure that is conductively coupled to the first conductive structure. In this example, forming the second conductive structure includes forming a ruthenium cap layer on and in contact with an upper surface of the first conductive structure, with the ruthenium cap layer in position, forming a liner layer comprising manganese on and in contact with at least the surfaces of the second layer of insulating material, wherein an upper surface of the ruthenium cap layer is substantially free of the liner layer, and forming a bulk ruthenium material on and in contact with the liner layer, wherein a bottom surface of the bulk ruthenium material contacts the upper surface of the ruthenium cap layer.
Information query
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