Invention Grant
US09589789B2 Compositions of low-K dielectric sols containing nonmetallic catalysts
有权
含有非金属催化剂的低K电介质溶胶的组成
- Patent Title: Compositions of low-K dielectric sols containing nonmetallic catalysts
- Patent Title (中): 含有非金属催化剂的低K电介质溶胶的组成
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Application No.: US14976995Application Date: 2015-12-21
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Publication No.: US09589789B2Publication Date: 2017-03-07
- Inventor: Mark L. F. Phillips , Travis Savage
- Applicant: SBA Materials, Inc.
- Applicant Address: US NM Albuquerque
- Assignee: SBA Materials, Inc.
- Current Assignee: SBA Materials, Inc.
- Current Assignee Address: US NM Albuquerque
- Agency: Berliner & Associates
- Main IPC: H01L21/00
- IPC: H01L21/00 ; C08J9/00 ; H01L21/02 ; C09D183/04 ; H01L21/768 ; C08G77/18
Abstract:
A sol composition for producing a porous low-k dielectric material is provided. The composition can include at least one silicate ester, a polar solvent, water, an acid catalyst for silicate ester hydrolysis, an amphiphilic block copolymer surfactant, and a nonmetallic catalyst that reduces dielectric constant in the produced material. The composition can further include a metallic ion at a lower parts-per-million concentration than the nonmetallic catalyst, and/or the composition can further include a cosolvent. A method of preparing a thin film on a substrate using the sol composition is also provided.
Public/Granted literature
- US20160111275A1 COMPOSITIONS OF LOW-K DIELECTRIC SOLS CONTAINING NONMETALLIC CATALYSTS Public/Granted day:2016-04-21
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