Invention Grant
- Patent Title: Method and systems for in-situ formation of intermediate reactive species
- Patent Title (中): 中间反应物种原位形成的方法和系统
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Application No.: US13791246Application Date: 2013-03-08
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Publication No.: US09589770B2Publication Date: 2017-03-07
- Inventor: Jereld Lee Winkler
- Applicant: ASM IP Holding B.V.
- Applicant Address: NL Almere
- Assignee: ASM IP Holding B.V.
- Current Assignee: ASM IP Holding B.V.
- Current Assignee Address: NL Almere
- Agency: Snell & Wilmer L.L.P.
- Main IPC: C23C16/00
- IPC: C23C16/00 ; C23F1/00 ; H01L21/306 ; H01J37/32 ; C23C16/452 ; C23C16/455 ; C23C16/52
Abstract:
A system and method for providing intermediate reactive species from a remote plasma unit to a reaction chamber are disclosed. The system includes a pressure control device to control a pressure at the remote plasma unit as intermediate reactive species from the remote plasma unit are provided to the reaction chamber.
Public/Granted literature
- US20140251953A1 METHOD AND SYSTEMS FOR IN-SITU FORMATION OF INTERMEDIATE REACTIVE SPECIES Public/Granted day:2014-09-11
Information query
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