Invention Grant
- Patent Title: Information matrix creation and calibration test pattern selection based on computational lithography model parameters
- Patent Title (中): 基于计算光刻模型参数的信息矩阵创建和校准测试模式选择
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Application No.: US13332303Application Date: 2011-12-20
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Publication No.: US09588439B1Publication Date: 2017-03-07
- Inventor: Antoine Jean Bruguier , Yu Cao , Jun Ye , Wenjin Shao
- Applicant: Antoine Jean Bruguier , Yu Cao , Jun Ye , Wenjin Shao
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G06F17/10
- IPC: G06F17/10 ; G06F7/60 ; G03F7/20 ; G06F17/50

Abstract:
Embodiments of the present invention describe methods of selecting a subset of test patterns from an initial larger set of test patterns for calibrating a computational lithography model. An example method comprises: generating an information matrix for the initial larger set of test patterns, wherein the terms of the information matrix comprise one or more identified model parameters that represent a lithographic process response; and, executing a selection algorithm using terms of the information matrix to select the subset of test patterns that effectively determines values of the identified model parameters that contribute significantly in the lithographic process response, wherein the subset of test patterns characteristically represents the initial larger set of test patterns. The selection algorithm explores coverage relationships existing in the initial larger set of test patterns.
Information query