Invention Grant
- Patent Title: Illumination optical apparatus having deflecting member, lens, polarization member to set polarization in circumference direction, and optical integrator
- Patent Title (中): 具有偏转构件，透镜，偏振构件以设定圆周方向偏振的照明光学装置和光学积分器
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Application No.: US13890547Application Date: 2013-05-09
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Publication No.: US09588432B2Publication Date: 2017-03-07
- Inventor: Takehito Kudo , Shigeru Hirukawa
- Applicant: NIKON CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIKON CORPORATION
- Current Assignee: NIKON CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Oliff PLC
- Priority: JP2003-105920 20030409; JP2003-299628 20030825; JP2003-307806 20030829; JP2003-329194 20030919; JP2003-329309 20030922
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G03B27/42
Abstract:
An illumination optical apparatus illuminates a pattern on a mask with illumination light. The illumination optical apparatus includes an optical integrator arranged in an optical path of the illumination light, a deflecting member arranged in the optical path on an incidence side of the optical integrator, which deflects the illumination light, a lens element arranged in the optical path between the deflecting member and the optical integrator, which distributes the illumination light in a region, on a pupil plane of the illumination optical apparatus, away from an optical axis of the illumination optical apparatus, and a polarization member arranged in the optical path between the lens element and the optical integrator, which changes a polarization state of the illumination light so that a polarization direction of the illumination light in the region is substantially coincident with a circumferential direction about the optical axis.
Public/Granted literature
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