Invention Grant
US09587968B2 Sensor device and method for producing a sensor device 有权
传感器装置及其制造方法

Sensor device and method for producing a sensor device
Abstract:
A sensor device includes a sensor element configured to detect a measurement value based at least in part upon a physical variable, and a support element configured to support the sensor element. The support element has at least one connection region which is located in a section of the support element, and which is configured to connect the section of the support element to a section of the sensor element such that the sensor element is mounted so as to be movable with respect to the support element.
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