Invention Grant
- Patent Title: Disk-shaped workpiece dividing method
- Patent Title (中): 盘形工件分割方法
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Application No.: US14215368Application Date: 2014-03-17
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Publication No.: US09586331B2Publication Date: 2017-03-07
- Inventor: Shunichiro Hirosawa
- Applicant: DISCO CORPORATION
- Applicant Address: JP Tokyo
- Assignee: Disco Corporation
- Current Assignee: Disco Corporation
- Current Assignee Address: JP Tokyo
- Agency: Greer Burns & Crain Ltd.
- Priority: JP2013-080097 20130408
- Main IPC: B26D1/04
- IPC: B26D1/04 ; H01L21/78 ; B28D5/02 ; H01L21/67

Abstract:
A dividing method for a disk-shaped workpiece having a plurality of first division lines and a plurality of second division lines intersecting the first division lines. The workpiece is cut along the first and second division lines by using a cutting blade in a down cut manner as supplying a cutting fluid to the cutting blade, wherein the workpiece is fully cut in a thickness direction thereof to obtain a plurality of chips. The dividing method includes a first cutting step of cutting the workpiece along the first division lines and a second cutting step of cutting the workpiece along the second division lines. In at least the second cutting step, the outer circumference of the workpiece at the cut end of each second division line is not cut to form an uncut region, thereby suppressing the formation of waste chips.
Public/Granted literature
- US20140298968A1 DISK-SHAPED WORKPIECE DIVIDING METHOD Public/Granted day:2014-10-09
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