Invention Grant
US09564444B2 Method of forming integrated fin and strap structure for an access transistor of a trench capacitor
有权
形成沟槽电容器存取晶体管的集成鳍片和带结构的方法
- Patent Title: Method of forming integrated fin and strap structure for an access transistor of a trench capacitor
- Patent Title (中): 形成沟槽电容器存取晶体管的集成鳍片和带结构的方法
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Application No.: US14874392Application Date: 2015-10-03
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Publication No.: US09564444B2Publication Date: 2017-02-07
- Inventor: Kevin K. Chan , Babar A. Khan , Dae-Gyu Park , Xinhui Wang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/94 ; H01L29/66 ; H01L27/12 ; H01L49/02 ; H01L29/04 ; H01L29/06 ; H01L29/10

Abstract:
At least one dielectric pad layer is formed on a semiconductor-on-insulator (SOI) substrate. A deep trench is formed in the SOI substrate, and a combination of an outer electrode, a node dielectric, and an inner electrode are formed such that the top surface of the inner electrode is recessed below the top surface of a buried insulator layer of the SOI substrate. Selective epitaxy is performed to fill a cavity overlying the inner electrode with an epitaxial semiconductor material portion. A top semiconductor material layer and the epitaxial semiconductor material portion are patterned to form a fin structure including a portion of the top semiconductor material layer and a portion of the epitaxial semiconductor material portion. The epitaxial semiconductor material portion functions as a conductive strap structure between the inner electrode and a semiconductor device to be formed on the fin structure.
Public/Granted literature
- US20160099249A1 INTEGRATED FIN AND STRAP STRUCTURE FOR AN ACCESS TRANSISTOR OF A TRENCH CAPACITOR Public/Granted day:2016-04-07
Information query
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