Invention Grant
- Patent Title: Dynamic random access memory cell with self-aligned strap
- Patent Title (中): 具有自对准带的动态随机存取存储单元
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Application No.: US14158956Application Date: 2014-01-20
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Publication No.: US09564443B2Publication Date: 2017-02-07
- Inventor: John E. Barth, Jr. , Kangguo Cheng , Herbert L. Ho , Ali Khakifirooz , Ravikumar Ramachandran , Kern Rim , Reinaldo A. Vega
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L27/108
- IPC: H01L27/108 ; H01L29/417 ; H01L29/66

Abstract:
After formation of trench capacitors and source and drain regions and gate structures for access transistors, a dielectric spacer is formed on a first sidewall of each source region, while a second sidewall of each source region and sidewalls of drain regions are physically exposed. Each dielectric spacer can be employed as an etch mask during removal of trench top dielectric portions to form strap cavities for forming strap structures. Optionally, selective deposition of a semiconductor material can be performed to form raised source and drain regions. In this case, the raised source regions grow only from the first sidewalls and do not grow from the second sidewalls. The raised source regions can be employed as a part of an etch mask during formation of the strap cavities. The strap structures are formed as self-aligned structures that are electrically isolated from adjacent access transistors by the dielectric spacers.
Public/Granted literature
- US20150206884A1 DYNAMIC RANDOM ACCESS MEMORY CELL WITH SELF-ALIGNED STRAP Public/Granted day:2015-07-23
Information query
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