Invention Grant
US09564438B2 Semiconductor structure containing semiconductor fins and insulating fence fins on a same substrate
有权
半导体结构在相同的基板上包含半导体鳍片和绝缘栅栏翅片
- Patent Title: Semiconductor structure containing semiconductor fins and insulating fence fins on a same substrate
- Patent Title (中): 半导体结构在相同的基板上包含半导体鳍片和绝缘栅栏翅片
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Application No.: US14841104Application Date: 2015-08-31
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Publication No.: US09564438B2Publication Date: 2017-02-07
- Inventor: Sivananda K. Kanakasabapathy
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Scully, Scott, Murphy & Presser, P.C.
- Agent Steven J. Meyers
- Main IPC: H01L27/092
- IPC: H01L27/092 ; H01L29/06 ; H01L21/8238 ; H01L27/118

Abstract:
A semiconductor structure may be formed by forming a first semiconductor fin and a second inactive semiconductor fin above a substrate; depositing a masking layer above the first semiconductor fin and the second semiconductor fin; etching a trench in the masking layer exposing the second semiconductor fin while the first semiconductor fin remains covered by the masking layer; removing the second semiconductor fin to form a fin recess beneath the trench; filling the fin recess with an insulating material to form an insulating fence fin; and removing the masking layer to expose the first semiconductor fin and the insulating fence fin. A third semiconductor fin separating the first semiconductor fin from the second semiconductor fin may also be formed prior to depositing the masking layer and covered by the masking layer. The first semiconductor fin may be a pFET fin and the third semiconductor fin may be an nFET fin.
Public/Granted literature
- US20150371990A1 FABRICATION OF INSULATING FENCE FINS Public/Granted day:2015-12-24
Information query
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