Invention Grant
- Patent Title: Semiconductor device and method of manufacturing the same
- Patent Title (中): 半导体装置及其制造方法
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Application No.: US14931991Application Date: 2015-11-04
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Publication No.: US09564426B2Publication Date: 2017-02-07
- Inventor: Tohru Kawai , Yasutaka Nakashiba , Yutaka Akiyama
- Applicant: Renesas Electronics Corporation
- Applicant Address: JP Tokyo
- Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee: RENESAS ELECTRONICS CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Mattingly & Malur, PC
- Priority: JP2015-004147 20150113
- Main IPC: H01L27/06
- IPC: H01L27/06 ; H01L29/423 ; H01L29/66 ; H01L29/739 ; H01L29/78 ; H01L27/07 ; H01L23/00

Abstract:
Performance of a semiconductor device is improved without increasing an area size of a semiconductor chip. For example, a source electrode of a power transistor and an upper electrode of a capacitor element have an overlapping portion. In other word, the upper electrode of the capacitor element is formed over the source electrode of the power transistor through a capacitor insulating film. That is, the power transistor and the capacitor element are arranged in a laminated manner in a thickness direction of the semiconductor chip. As a result, it becomes possible to add a capacitor element to be electrically coupled to the power transistor while suppressing an increase in planar size of the semiconductor chip.
Public/Granted literature
- US20160204099A1 SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2016-07-14
Information query
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