An apparatus including a planar semiconductor substrate including a plurality of devices and a first pattern of electrical contacts formed on the first surface of the semiconductor substrate; and a plurality of layers of conductive material alternating between dielectric material on the first surface of the semiconductor substrate, the plurality of layers of conductive material including a wiring layer including a second pattern of electrical contacts, wherein the second surface of the semiconductor substrate includes openings to the first pattern of electrical contacts. A method including forming a space transformer including a semiconductor substrate including, on a device side, a device region, a first pattern of electrical contacts, and at least one routing layer and a pad layer including a second pattern of electrical contacts; and forming openings through the space transformer to the first pattern of electrical contacts on the semiconductor substrate.