Invention Grant
- Patent Title: Dual liner silicide
- Patent Title (中): 双衬里硅化物
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Application No.: US14740987Application Date: 2015-06-16
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Publication No.: US09564372B2Publication Date: 2017-02-07
- Inventor: Balasubramanian Pranatharthiharan , Ruilong Xie , Chun-Chen Yeh
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION , GLOBALFOUNDRIES Inc
- Applicant Address: US NY Armonk KY Grand Cayman
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC.
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION,GLOBALFOUNDRIES INC.
- Current Assignee Address: US NY Armonk KY Grand Cayman
- Agency: Tutunjian & Bitetto, P.C.
- Agent Vazken Alexanian
- Main IPC: H01L21/82
- IPC: H01L21/82 ; H01L21/8238 ; H01L29/66 ; H01L27/092 ; H01L29/417

Abstract:
A method for fabricating a dual silicide device includes growing source and drain (S/D) regions for an N-type device, forming a protection layer over a gate structure and the S/D regions of the N-type device and growing S/D regions for a P-type device. A first dielectric layer is conformally deposited and portions removed to expose the S/D regions. Exposed S/D regions for the P-type device are silicided to form a liner. A second dielectric layer is conformally deposited. A dielectric fill is formed over the second dielectric layer. Contact holes are opened through the second dielectric layer to expose the liner for the P-type device and expose the protection layer for the N-type device. The S/D regions for the N-type device are exposed by opening the protection layer. Exposed S/D regions adjacent to the gate structure are silicided to form a liner for the N-type device. Contacts are formed.
Public/Granted literature
- US20160372380A1 DUAL LINER SILICIDE Public/Granted day:2016-12-22
Information query
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