Invention Grant
- Patent Title: Methods of forming a pattern and devices formed by the same
- Patent Title (中): 形成图案的方法及由其形成的装置
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Application No.: US14220440Application Date: 2014-03-20
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Publication No.: US09564324B2Publication Date: 2017-02-07
- Inventor: Eunsung Kim , Jaewoo Nam , Chulho Shin
- Applicant: Eunsung Kim , Jaewoo Nam , Chulho Shin
- Applicant Address: KR Gyeonggi-Do
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Gyeonggi-Do
- Agency: Harness, Dickey & Pierce, P.L.C.
- Priority: KR10-2013-0067223 20130612
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/027 ; H01L29/66 ; H01L27/108 ; H01L27/115

Abstract:
The inventive concepts provide methods of forming a pattern. In the method, a block copolymer layer may be formed on a neutral layer having an uneven structure and then phase separation is induced. The neutral layer may have an affinity for all of a hydrophilic polymer and a hydrophobic polymer, so that vertical cultivation of phases of the block copolymer may be realized on the uneven structure. Thus, a self-assembled phenomenon may be induced.
Public/Granted literature
- US20140370712A1 METHODS OF FORMING A PATTERN AND DEVICES FORMED BY THE SAME Public/Granted day:2014-12-18
Information query
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