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US09564324B2 Methods of forming a pattern and devices formed by the same 有权
形成图案的方法及由其形成的装置

Methods of forming a pattern and devices formed by the same
Abstract:
The inventive concepts provide methods of forming a pattern. In the method, a block copolymer layer may be formed on a neutral layer having an uneven structure and then phase separation is induced. The neutral layer may have an affinity for all of a hydrophilic polymer and a hydrophobic polymer, so that vertical cultivation of phases of the block copolymer may be realized on the uneven structure. Thus, a self-assembled phenomenon may be induced.
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