Invention Grant
- Patent Title: Methods of manufacturing large-area sputtering targets using interlocking joints
- Patent Title (中): 使用互锁接头制造大面积溅射靶的方法
-
Application No.: US15042987Application Date: 2016-02-12
-
Publication No.: US09564299B2Publication Date: 2017-02-07
- Inventor: Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
- Applicant: Scott Jeffrey Volchko , William Loewenthal , Stefan Zimmermann , Mark Gaydos , Steven Alfred Miller
- Applicant Address: US MA Newton
- Assignee: H.C. Starck, Inc.
- Current Assignee: H.C. Starck, Inc.
- Current Assignee Address: US MA Newton
- Agency: Morgan, Lewis & Bockius LLP
- Main IPC: B23K31/02
- IPC: B23K31/02 ; H01J37/34 ; B05D1/02 ; C23C14/34 ; C23C24/04
Abstract:
In various embodiments, joined sputtering targets are formed at least in part by spray deposition of the sputtering material and/or welding.
Public/Granted literature
- US20160163520A1 METHODS OF MANUFACTURING LARGE-AREA SPUTTERING TARGETS USING INTERLOCKING JOINTS Public/Granted day:2016-06-09
Information query
IPC分类:
