Invention Grant
- Patent Title: Plasma treatment apparatus and plasma antenna
- Patent Title (中): 等离子体处理装置和等离子天线
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Application No.: US13126042Application Date: 2009-10-26
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Publication No.: US09564294B2Publication Date: 2017-02-07
- Inventor: Sang Ho Woo , Il Kwang Yang , Byung Gyu Song
- Applicant: Sang Ho Woo , Il Kwang Yang , Byung Gyu Song
- Applicant Address: KR Yongin-si, Gyeonggi-do
- Assignee: EUGENE TECHNOLOGY CO., LTD.
- Current Assignee: EUGENE TECHNOLOGY CO., LTD.
- Current Assignee Address: KR Yongin-si, Gyeonggi-do
- Agency: Rabin & Berdo, P.C.
- Priority: KR10-2008-0108283 20081103
- International Application: PCT/KR2009/006178 WO 20091026
- International Announcement: WO2010/062040 WO 20100603
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H05H1/46

Abstract:
According to one embodiment of the present invention, a plasma treatment apparatus comprises: a chamber having an inner space in which processes for an object to be treated are performed; and an antenna which is arranged to cover the side part of the chamber, and which forms electric fields in said inner space to generate plasma from the source gas supplied in the inner space. The antenna includes a helical antenna which is formed into a helical shape from one side of the chamber toward the other side of the chamber along a first rotation direction, and which has a current flowing in the first rotation direction; an extension antenna which is connected to one end of the helical antenna positioned at said one side of the chamber, and which has a current flowing in the direction opposite to the first rotation direction; and a connection antenna for interconnecting the extension antenna and the helical antenna.
Public/Granted literature
- US20110198032A1 PLASMA TREATMENT APPARATUS AND PLASMA ANTENNA Public/Granted day:2011-08-18
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