Invention Grant
- Patent Title: Ion implanter and method of controlling the same
- Patent Title (中): 离子注入机及其控制方法
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Application No.: US14793265Application Date: 2015-07-07
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Publication No.: US09564289B2Publication Date: 2017-02-07
- Inventor: Tadanobu Kagawa , Toshio Yumiyama , Takeshi Kurose
- Applicant: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Applicant Address: JP Tokyo
- Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Current Assignee: Sumitomo Heavy Industries Ion Technology Co., Ltd.
- Current Assignee Address: JP Tokyo
- Agency: Michael Best & Friedrich LLP
- Priority: JP2014-141481 20140709
- Main IPC: H01J37/317
- IPC: H01J37/317 ; H01J37/24

Abstract:
An ion implanter includes a high-voltage power supply, a control unit that generates a command signal controlling an output voltage of the high-voltage power supply, an electrode unit to which the output voltage is applied, and a measurement unit that measures an actual voltage applied to the electrode unit. The control unit includes a first generation section that generates a first command signal for allowing the high-voltage power supply to output a target voltage, a second generation section that generates a second command signal for complementing the first command signal so that the actual voltage measured by the measurement unit becomes or close to the target voltage, and a command section that brings to the high-voltage power supply a synthetics command signal which is produced by synthesizing the first command signal and the second command signal.
Public/Granted literature
- US20160013014A1 ION IMPLANTER AND METHOD OF CONTROLLING THE SAME Public/Granted day:2016-01-14
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