Invention Grant
- Patent Title: Fluid handling structure, a lithographic apparatus and a device manufacturing method
- Patent Title (中): 流体处理结构,光刻设备和装置制造方法
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Application No.: US13564210Application Date: 2012-08-01
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Publication No.: US09563132B2Publication Date: 2017-02-07
- Inventor: David Bessems , Erik Henricus Egidius Catharina Eummelen , Michel Riepen , Rogier Hendrikus Magdalena Cortie , Adrianes Johannes Baeten , Cornelius Maria Rops
- Applicant: David Bessems , Erik Henricus Egidius Catharina Eummelen , Michel Riepen , Rogier Hendrikus Magdalena Cortie , Adrianes Johannes Baeten , Cornelius Maria Rops
- Applicant Address: NL Veldhoven
- Assignee: ASML NETHERLANDS B.V.
- Current Assignee: ASML NETHERLANDS B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Main IPC: G03F7/20
- IPC: G03F7/20

Abstract:
A fluid handling structure for a lithographic apparatus, the fluid handling structure having, at a boundary of a space configured to contain immersion fluid to a region external to the fluid handling structure: a meniscus pinning feature to resist passage of immersion fluid in a radially outward direction from the space; a gas supply opening at least partly surrounding and radially outward of the meniscus pinning feature; and optionally a gas recovery opening radially outward of the gas supply opening, wherein the gas supply opening, or the gas recovery opening, or both the gas supply opening and the gas recovery opening, has an open area per meter length which has a variation peripherally around the space.
Public/Granted literature
- US20130033692A1 FLUID HANDLING STRUCTURE, A LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD Public/Granted day:2013-02-07
Information query
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