Invention Grant
- Patent Title: Optical axis adjustment device for X-ray analyzer
- Patent Title (中): X射线分析仪用光轴调整装置
-
Application No.: US14533188Application Date: 2014-11-05
-
Publication No.: US09562867B2Publication Date: 2017-02-07
- Inventor: Kouji Kakefuda , Ichiro Tobita
- Applicant: RIGAKU CORPORATION
- Applicant Address: JP Akishima-Shi, Tokyo
- Assignee: RIGAKU CORPORATION
- Current Assignee: RIGAKU CORPORATION
- Current Assignee Address: JP Akishima-Shi, Tokyo
- Agency: Buchanan Ingersoll & Rooney PC
- Priority: JP2013-242713 20131125; JP2014-185353 20140911
- Main IPC: G01N23/207
- IPC: G01N23/207

Abstract:
Provided is an optical axis adjustment device for an X-ray analyzer comprising an incident-side arm, a receiving-side arm, an X-ray source, an incident-side slit, and an X-ray detector, wherein the device comprises a shielding strip disposed at a position blocking X-rays received by the X-ray detector from the X-ray source, and a shielding strip-moving device that rotates the shielding strip around the sample axis relative to the optical axis of X-rays reaching the X-ray detector from the X-ray source to two angle positions, and the amount of deviation in parallelism of the surface of a sample with respect to the optical axis of the X-rays is found on the basis of X-ray intensity values found by the X-ray detector for the two angle positions.
Public/Granted literature
- US20150146860A1 OPTICAL AXIS ADJUSTMENT DEVICE FOR X-RAY ANALYZER Public/Granted day:2015-05-28
Information query