Invention Grant
- Patent Title: Nanoimprint lithography
- Patent Title (中): 纳米压印光刻
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Application No.: US13733721Application Date: 2013-01-03
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Publication No.: US09561603B2Publication Date: 2017-02-07
- Inventor: Roderick A. Hyde , Jordin T. Kare , Thomas A. Weaver
- Applicant: Elwha LLC
- Applicant Address: US WA Bellevue
- Assignee: ELWHA, LLC
- Current Assignee: ELWHA, LLC
- Current Assignee Address: US WA Bellevue
- Main IPC: B29C33/42
- IPC: B29C33/42 ; B29C59/02 ; G03F7/00 ; B29C35/08 ; B29C35/16

Abstract:
A mold may include a plurality of nanostructures configured to form a lithographic pattern when imprinted into a material. Imprinting may include imprinting the mold a first predetermined distance, modifying a temperature of the material, and altering a position of the mold based on the temperature modification. One or more thermal elements may alter a temperature of a first section of the material and/or one or more nanostructures for a predetermined pulse time less than an equilibrium time required for the mold and/or material to reach a stable temperature state. A first thermal element may selectively alter the temperature of a first section of the material and/or a first nanostructure and a second thermal element may selectively alter the temperature of a second section of the material and/or a second nanostructure. The one or more thermal elements may include one or more thermoelectric elements.
Public/Granted literature
- US20140183795A1 NANOIMPRINT LITHOGRAPHY Public/Granted day:2014-07-03
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