Invention Grant
- Patent Title: Source/drain structure of semiconductor device
- Patent Title (中): 半导体器件的源极/漏极结构
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Application No.: US14828296Application Date: 2015-08-17
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Publication No.: US09537008B2Publication Date: 2017-01-03
- Inventor: Wei-Yang Lee , Chih-Shan Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Slater Matsil, LLP
- Main IPC: H01L27/01
- IPC: H01L27/01 ; H01L27/12 ; H01L31/0392 ; H01L29/78 ; H01L29/66 ; H01L21/02 ; H01L29/165 ; H01L29/06 ; H01L21/3065

Abstract:
The disclosure relates to a semiconductor device. An exemplary structure for a semiconductor device comprises an isolation structure comprising a top surface over a substrate major surface; a cavity having a convex bottom surface below the top surface; a strained material in the cavity and extending above the top surface, wherein the strained material comprises an upper portion having a rhombus shape and a lower portion having substantially vertical sidewalls; and a pair of tapered spacers adjoining a portion of the substantially vertical sidewalls above the top surface.
Public/Granted literature
- US20150357469A1 Source/Drain Structure of Semiconductor Device Public/Granted day:2015-12-10
Information query
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