Invention Grant
- Patent Title: Thin film transistor and method for manufacturing thin film transistor
- Patent Title (中): 薄膜晶体管及制造薄膜晶体管的方法
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Application No.: US14386811Application Date: 2013-03-18
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Publication No.: US09536993B2Publication Date: 2017-01-03
- Inventor: Tatsuya Shimoda , Satoshi Inoue , Tue Trong Phan , Takaaki Miyasako , Jinwang Li
- Applicant: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Applicant Address: JP Saitama
- Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee: JAPAN SCIENCE AND TECHNOLOGY AGENCY
- Current Assignee Address: JP Saitama
- Priority: JP2012-068133 20120323
- International Application: PCT/JP2013/057621 WO 20130318
- International Announcement: WO2013/141197 WO 20130926
- Main IPC: H01L29/10
- IPC: H01L29/10 ; H01L29/12 ; H01L29/66 ; H01L29/786 ; H01L29/49

Abstract:
A thin film transistor 100 according to the invention includes a gate electrode 20, a channel 44, and a gate insulating layer 34 provided between the gate electrode 20 and the channel 44 and made of oxide (possibly containing inevitable impurities; this applies to oxide hereinafter) containing lanthanum and zirconium. The channel 44 is made of channel oxide including first oxide containing indium, zinc, and zirconium (Zr) having an atomic ratio of 0.015 or more and 0.075 or less relative to indium assumed to be 1 in atomic ratio, second oxide containing indium and zirconium (Zr) having an atomic ratio of 0.055 or more and 0.16 or less relative to the indium (In) assumed to be 1 in atomic ratio, or third oxide containing indium and lanthanum having an atomic ratio of 0.055 or more and 0.16 or less relative to the indium (In) assumed to be 1 in atomic ratio.
Public/Granted literature
- US20150076487A1 THIN FILM TRANSISTOR AND METHOD FOR MANUFACTURING THIN FILM TRANSISTOR Public/Granted day:2015-03-19
Information query
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