Invention Grant
- Patent Title: Method for producing semiconductor device
- Patent Title (中): 半导体器件的制造方法
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Application No.: US15222334Application Date: 2016-07-28
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Publication No.: US09536927B2Publication Date: 2017-01-03
- Inventor: Fujio Masuoka , Hiroki Nakamura
- Applicant: Unisantis Electronics Singapore Pte. Ltd.
- Applicant Address: SG Peninsula Plaza
- Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD
- Current Assignee: UNISANTIS ELECTRONICS SINGAPORE PTE. LTD
- Current Assignee Address: SG Peninsula Plaza
- Agency: Brinks Gilson & Lione
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L21/336 ; H01L29/76 ; H01L27/24 ; H01L29/66 ; H01L29/786 ; H01L29/423 ; H01L45/00

Abstract:
A method for producing a semiconductor device includes forming a fin-shaped semiconductor layer on a semiconductor substrate and a first pillar-shaped semiconductor layer, a first dummy gate layer and a second pillar-shaped semiconductor layer, and a second dummy gate layer. Third and fourth dummy gate layers are formed on sidewalls of the first dummy layer gate, the first pillar-shaped semiconductor layer, the second dummy gate layer and the second pillar-shaped semiconductor layer. An interlayer insulating film is deposited, the dummy gate layers are removed, and a gate insulator is formed film around the first and second pillar-shaped semiconductor layers. A first metal is deposited and a gate electrode and a gate line are formed around the first pillar-shaped semiconductor layer. Second and third metals are deposited and a first contact and a pillar-shaped resistance-changing layer, a lower electrode, and a reset gate are formed.
Public/Granted literature
- US20160336377A1 METHOD FOR PRODUCING SEMICONDUCTOR DEVICE Public/Granted day:2016-11-17
Information query
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