Invention Grant
US09536885B2 Hybrid FINFET/nanowire SRAM cell using selective germanium condensation
有权
使用选择性锗冷凝的混合FINFET /纳米线SRAM单元
- Patent Title: Hybrid FINFET/nanowire SRAM cell using selective germanium condensation
- Patent Title (中): 使用选择性锗冷凝的混合FINFET /纳米线SRAM单元
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Application No.: US14672282Application Date: 2015-03-30
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Publication No.: US09536885B2Publication Date: 2017-01-03
- Inventor: Josephine B. Chang , Leland Chang , Isaac Lauer , Jeffrey W. Sleight
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agent Gilbert Harmon, Jr.
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/12 ; H01L27/092 ; H01L21/84 ; H01L29/06 ; H01L29/41

Abstract:
A semiconductor device including a pFET and an nFET where: (i) the gate and conductor channel of the pFET are electrically insulated from a buried oxide layer; and (ii) the conductor channel of the nFET is in the form of a fin extending upwards from, and in electrical contact with, the buried oxide layer. Also, a method of making the pFET by adding a fin structure extending from the top surface of the buried oxide layer, then condensing germanium locally into the lattice structure of the lower portion of the fin structure, and then etching away the lower portion of the fin structure so that it becomes a carrier channel suspended above, and electrically insulated from the buried oxide layer.
Public/Granted literature
- US20160293610A1 HYBRID FINFET/NANOWIRE SRAM CELL USING SELECTIVE GERMANIUM CONDENSATION Public/Granted day:2016-10-06
Information query
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