Invention Grant
US09536846B2 Semiconductor devices having through electrodes, methods of fabricating the same, electronic systems including the same, and memory cards including same 有权
具有通孔电极的半导体器件,其制造方法,包括该半导体器件的电子系统和包括该电极的存储卡

  • Patent Title: Semiconductor devices having through electrodes, methods of fabricating the same, electronic systems including the same, and memory cards including same
  • Patent Title (中): 具有通孔电极的半导体器件,其制造方法,包括该半导体器件的电子系统和包括该电极的存储卡
  • Application No.: US14526073
    Application Date: 2014-10-28
  • Publication No.: US09536846B2
    Publication Date: 2017-01-03
  • Inventor: Jin Woo ParkSung Su ParkBae Yong Kim
  • Applicant: SK hynix Inc.
  • Applicant Address: KR Icheon
  • Assignee: SK HYNIX INC.
  • Current Assignee: SK HYNIX INC.
  • Current Assignee Address: KR Icheon
  • Priority: KR10-2014-0089995 20140716
  • Main IPC: H01L23/00
  • IPC: H01L23/00 H01L23/48 H01L21/768 H01L21/683
Semiconductor devices having through electrodes, methods of fabricating the same, electronic systems including the same, and memory cards including same
Abstract:
A semiconductor device includes a chip body having an uneven surface including at least two regions at different levels from one another, a through electrode penetrating the chip body and having an end which is exposed by the uneven surface of the chip body, a passivation layer disposed on the uneven surface of the chip body, and a bump disposed on the passivation layer and the exposed end of the through electrode and overlapping with the uneven surface of the chip body.
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