Invention Grant
- Patent Title: Programmable electrical fuse in keep out zone
- Patent Title (中): 可编程电气保险丝在防区
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Application No.: US14483258Application Date: 2014-09-11
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Publication No.: US09536829B2Publication Date: 2017-01-03
- Inventor: Mukta G. Farooq , Timothy D. Sullivan , Ping-Chuan Wang , Lijuan Zhang
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: Internatonal Business Machines Corporation
- Current Assignee: Internatonal Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Hoffman Warnick LLC
- Agent Steven J. Meyers
- Main IPC: H01L23/58
- IPC: H01L23/58 ; H01L23/525 ; H01L23/48
Abstract:
An method including forming a back end of the line (BEOL) wiring portion directly on top of a semiconductor base portion, the BEOL wiring portion including a plurality of layers of a metallic material and a dielectric material and excluding a semiconductor material, forming a through-substrate via through the BEOL wiring portion and the semiconductor base portion, forming an electronic fuse in the BEOL wiring portion adjacent to the through-substrate via, and forming a guard ring in the BEOL wiring portion surrounding the through-substrate via and the electronic fuse in the BEOL wiring portion, the through-substrate via in the semiconductor base portion being free from the guard ring.
Public/Granted literature
- US20160079166A1 PROGRAMMABLE ELECTRICAL FUSE IN KEEP OUT ZONE Public/Granted day:2016-03-17
Information query
IPC分类:
