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US09536775B2 Aspect ratio for semiconductor on insulator 有权
半导体绝缘体的长宽比

Aspect ratio for semiconductor on insulator
Abstract:
A method comprises forming one or more fins in a first region on an insulated substrate. The method also comprises forming one or more fins formed in a second region on the insulated substrate. The insulated substrate comprising a silicon substrate, and an insulator layer deposited on the silicon substrate. The one or more fins in the first region comprising a first material layer deposited on the insulator layer. The one or more fins in the second region comprising a second material layer deposited on the insulator layer.
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