Invention Grant
- Patent Title: Load port unit and EFEM system
- Patent Title (中): 加载端口单元和EFEM系统
-
Application No.: US14291352Application Date: 2014-05-30
-
Publication No.: US09536765B2Publication Date: 2017-01-03
- Inventor: Tadamasa Iwamoto , Jun Emoto , Toshihiko Miyajima , Hidenori Tsutsui
- Applicant: TDK Corporation
- Applicant Address: JP Tokyo
- Assignee: TDK Corporation
- Current Assignee: TDK Corporation
- Current Assignee Address: JP Tokyo
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-119576 20130606
- Main IPC: H01L21/673
- IPC: H01L21/673 ; H01L21/677 ; H01L21/67
Abstract:
A load port unit can prevent or control leakage of inert gas from an EFEM system to the outside. The load port unit used in the EFEM system is provided with an air inlet that opens on a side facing a mini-environment between the upper end of an opener driving unit and the lower end of the pod. The width of the air inlet opening is larger than the width of the opening of the pod. With this arrangement, surplus gas is sucked from the pod when gas purging is performed on the pod.
Public/Granted literature
- US20140363258A1 LOAD PORT UNIT AND EFEM SYSTEM Public/Granted day:2014-12-11
Information query
IPC分类:
