Invention Grant
US09536760B2 Semiconductor die encapsulation or carrier-mounting method, and corresponding semiconductor die encapsulation or carrier-mounting apparatus
有权
半导体管芯封装或载体安装方法,以及相应的半导体管芯封装或载体安装装置
- Patent Title: Semiconductor die encapsulation or carrier-mounting method, and corresponding semiconductor die encapsulation or carrier-mounting apparatus
- Patent Title (中): 半导体管芯封装或载体安装方法,以及相应的半导体管芯封装或载体安装装置
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Application No.: US14766161Application Date: 2014-02-05
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Publication No.: US09536760B2Publication Date: 2017-01-03
- Inventor: Johannes Cornelis De Beijer , Michiel Hendrikus Antonius Wilhelmus Rutten , Ger Huizing , Mike Louis Theodoor Hoedemaker
- Applicant: BOSCHMAN TECHNOLOGIES BV
- Applicant Address: NL Duiven
- Assignee: BOSCHMAN TECHNOLOGIES BV
- Current Assignee: BOSCHMAN TECHNOLOGIES BV
- Current Assignee Address: NL Duiven
- Agency: Young & Thompson
- Priority: NL2010252 20130206
- International Application: PCT/NL2014/050069 WO 20140205
- International Announcement: WO2014/123413 WO 20140814
- Main IPC: H01L21/67
- IPC: H01L21/67 ; H01L21/56 ; B29C45/14 ; B29C45/82 ; H01L21/66 ; H01L23/31 ; H01L23/495 ; H01L23/498 ; H01L23/00 ; B29C45/26

Abstract:
A semiconductor die encapsulation or carrier-mounting method and apparatus for manufacturing a semiconductor product, wherein a first tool part for holding multiple semiconductor dies is provided and the semiconductor dies are placed on the first tool part, one of the first and a second tool part including displaceable insert members applying a pressure by each displaceable insert member on a surface area of the semiconductor die, and the first and second tool parts are brought together to define a space between the first and second tool parts with the semiconductor products being arranged within the space. The pressure applied by the displaceable insert members is monitored and regulated to a predetermined pressure, and subsequently, the first and second tool parts are separated and the processed semiconductor dies removed.
Public/Granted literature
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