Invention Grant
- Patent Title: Lateral double-diffused MOSFET and fabrication method thereof
- Patent Title (中): 横向双扩散MOSFET及其制造方法
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Application No.: US14737692Application Date: 2015-06-12
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Publication No.: US09536742B2Publication Date: 2017-01-03
- Inventor: Dae-Sub Jung , Guohao Cao
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201410260908 20140612
- Main IPC: H01L21/265
- IPC: H01L21/265 ; H01L29/06 ; H01L21/762 ; H01L29/66 ; H01L29/78 ; H01L29/08 ; H01L29/10

Abstract:
The present disclosure provides a method for forming a Lateral Double-Diffused MOSFET (LDMOS). The method includes providing a semiconductor substrate having a first conductivity type; forming a first shallow trench isolation (STI) structure in the semiconductor substrate; and applying a first ion implantation to form a drift region of a second conductivity type into the semiconductor substrate with the drift region surrounding the first STI structure. The method also includes applying a counter-doping implantation to form a counter-doped region having the first conductivity in the drift region and forming a body region on one side of the drift region in the semiconductor substrate. The method further includes forming a gate structure on the semiconductor substrate, wherein one end of the gate structure extends to an area on the body region another end of the gate structure extends to an area on the first STI region.
Public/Granted literature
- US20150364598A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2015-12-17
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