Invention Grant
US09536699B2 Charged particle beam system and method of operating a charged particle beam system
有权
带电粒子束系统和操作带电粒子束系统的方法
- Patent Title: Charged particle beam system and method of operating a charged particle beam system
- Patent Title (中): 带电粒子束系统和操作带电粒子束系统的方法
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Application No.: US14314317Application Date: 2014-06-25
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Publication No.: US09536699B2Publication Date: 2017-01-03
- Inventor: John A. Notte, IV , Weijie Huang , Raymond Hill , FHM-Faridur Rahman , Alexander Groholski , Shawn McVey
- Applicant: Carl Zeiss Microscopy, LLC
- Applicant Address: US NY Thornwood
- Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee: Carl Zeiss Microscopy, LLC
- Current Assignee Address: US NY Thornwood
- Agency: Fish & Richardson P.C.
- Main IPC: H01J37/00
- IPC: H01J37/00 ; H01J37/08 ; G21K5/04 ; H01J27/26 ; H01J37/18
Abstract:
The present disclosure relates to a gas field ion source having a gun housing, an electrically conductive gun can base attached to the gun housing, an inner tube mounted to the gun can base, the inner tube being made of an electrically isolating ceramic, an electrically conductive tip attached to the inner tube, an outer tube mounted to the gun can base, the outer tube being made of an electrically isolating ceramic, and an extractor electrode attached to the outer tube. The extractor electrode can have an opening for the passage of ions generated in proximity to the electrically conductive tip.
Public/Granted literature
- US20150008332A1 CHARGED PARTICLE BEAM SYSTEM AND METHOD OF OPERATING A CHARGED PARTICLE BEAM SYSTEM Public/Granted day:2015-01-08
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