Invention Grant
US09535329B2 Grapho-epitaxy method for making patterns on the surface of a substrate
有权
用于在衬底表面上制作图案的Grapho-外延方法
- Patent Title: Grapho-epitaxy method for making patterns on the surface of a substrate
- Patent Title (中): 用于在衬底表面上制作图案的Grapho-外延方法
-
Application No.: US14854951Application Date: 2015-09-15
-
Publication No.: US09535329B2Publication Date: 2017-01-03
- Inventor: Patricia Pimenta Barros , Raluca Tiron , Xavier Chevalier , Ahmed Gharbi
- Applicant: Commissariat à l'énergie atomique et aux énergies alternatives
- Applicant Address: FR Paris
- Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee: COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIES ALTERNATIVES
- Current Assignee Address: FR Paris
- Agency: Pillsbury Winthrop Shaw Pittman LLP
- Priority: FR1458748 20140916
- Main IPC: H01L21/311
- IPC: H01L21/311 ; G03F7/40 ; G03F7/16 ; G03F7/00 ; H01L21/027 ; H01L21/033 ; H01L21/308

Abstract:
A method for making patterns on a substrate, includes forming an assembly guide on first and second areas of the substrate, the assembly guide having, compared to a reference surface, openings with an opening ratio in the first area greater than that of the second area; depositing a block copolymer layer on the substrate to entirely fill the assembly guide and form an over-thickness on the reference surface; assembling the block copolymer, resulting in an organised portion of the block copolymer layer inside the openings; thinning uniformly the block copolymer layer, until a thickness corresponding to the organised portion of the block copolymer layer is reached; eliminating one of the phases of the assembled block copolymer, resulting in a plurality of initial patterns extending into the layer of block copolymer; and transferring the initial patterns of the block copolymer layer into the substrate to form the final patterns.
Public/Granted literature
- US20160077439A1 GRAPHO-EPITAXY METHOD FOR MAKING PATTERNS ON THE SURFACE OF A SUBSTRATE Public/Granted day:2016-03-17
Information query
IPC分类: