Invention Grant
- Patent Title: MEMS sensor packaging and method thereof
- Patent Title (中): MEMS传感器封装及其方法
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Application No.: US14357046Application Date: 2012-11-09
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Publication No.: US09533875B2Publication Date: 2017-01-03
- Inventor: Yong Hee Han , Hyung Won Kim , Mi Sook Ahn
- Applicant: U Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: U Electronics Co., Ltd.
- Current Assignee: U Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: The Webb Law Firm
- Priority: KR10-2011-0117153 20111110
- International Application: PCT/KR2012/009447 WO 20121109
- International Announcement: WO2013/070013 WO 20130516
- Main IPC: B81B7/00
- IPC: B81B7/00 ; G01P15/08 ; B81C1/00 ; H01L31/02

Abstract:
A micro electro mechanical systems (MEMS) sensor packaging includes a first wafer having a readout integrated circuit (ROIC) formed thereon, a second wafer disposed corresponding to the first wafer and having a concave portion on one side thereof and a MEMS sensor prepared on the concave portion, joint solders formed along a surrounding of the MEMS sensor and sealing the MEMS sensor jointing the first and second wafers, and pad solders formed to electrically connect the ROIC circuit of the first wafer and the MEMS sensor of the second wafer. According to the present disclosure, in joining and packaging a wafer having the ROIC formed thereon and a wafer having the MEMS sensor formed thereon, the size of a package can be reduced and an electric signal can be stably provided by forming internally pad solders for electrically connecting the ROIC and the MEMS sensor.
Public/Granted literature
- US20140306312A1 MEMS Sensor Packaging and Method Thereof Public/Granted day:2014-10-16
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