Embodiments of the present invention are directed to electrical devices and methods for fabricating electrical devices using an oxidation process. According to one embodiment, a method of forming an electrical device using an oxidation process includes forming a metallic element which is to become an electrically insulating or resistive element in an electrical device; forming an electrically conductive element connected to the metallic element, wherein the metallic element and the electrically conductive element have different oxidation behavior when subjected to the oxidation process; and subjecting the elements forming the electrically insulating or resistive element and the electrically conductive element to the oxidation process.