Invention Grant
US09438201B2 Composite substrates for acoustic wave elements, and acoustic wave elements 有权
用于声波元件的复合衬底和声波元件

Composite substrates for acoustic wave elements, and acoustic wave elements
Abstract:
A composite substrate for an acoustic wave element includes a support substrate 1 and a propagation substrate 3 for propagating an acoustic wave. The propagation substrate is bonded to the support substrate 1 and composed of a piezoelectric single crystal. The propagation substrate 3 includes a surface lattice distortion layer 11 in which crystal lattices of the piezoelectric single crystal are distorted.
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