Invention Grant
US09437771B2 Monolithic active pixel radiation detector with shielding techniques
有权
具有屏蔽技术的单片有源像素辐射探测器
- Patent Title: Monolithic active pixel radiation detector with shielding techniques
- Patent Title (中): 具有屏蔽技术的单片有源像素辐射探测器
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Application No.: US13893514Application Date: 2013-05-14
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Publication No.: US09437771B2Publication Date: 2016-09-06
- Inventor: Grzegorz W. Deptuch
- Applicant: Grzegorz W. Deptuch
- Applicant Address: US IL Batavia
- Assignee: Fermi Research Alliance, LLC
- Current Assignee: Fermi Research Alliance, LLC
- Current Assignee Address: US IL Batavia
- Agency: Ortiz & Lopez, PLLC
- Agent Kermit D. Lopez; Luis M. Ortiz
- Main IPC: H01L31/113
- IPC: H01L31/113 ; H01L31/18 ; H01L31/115

Abstract:
A monolithic active pixel radiation detector including a method of fabricating thereof. The disclosed radiation detector can include a substrate comprising a silicon layer upon which electronics are configured. A plurality of channels can be formed on the silicon layer, wherein the plurality of channels are connected to sources of signals located in a bulk part of the substrate, and wherein the signals flow through electrically conducting vias established in an isolation oxide on the substrate. One or more nested wells can be configured from the substrate, wherein the nested wells assist in collecting charge carriers released in interaction with radiation and wherein the nested wells further separate the electronics from the sensing portion of the detector substrate. The detector can also be configured according to a thick SOA method of fabrication.
Public/Granted literature
- US20160155879A1 MONOLITHIC ACTIVE PIXEL RADIATION DETECTOR WITH SHIELDING TECHNIQUES Public/Granted day:2016-06-02
Information query
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