Invention Grant
- Patent Title: Finfet seal ring
- Patent Title (中): Finfet密封环
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Application No.: US14199216Application Date: 2014-03-06
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Publication No.: US09437739B2Publication Date: 2016-09-06
- Inventor: Tsung-Yuan Yu , Hsien-Wei Chen
- Applicant: Taiwan Semiconductor Manufacturing Company, LTD
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Company, Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Haynes and Boone, LLP
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/78 ; H01L21/8234 ; H01L29/66

Abstract:
A semiconductor device includes a first front-end-of-line (FEOL) seal ring on a substrate, the seal ring comprising ring-shaped fin-like structures, integrated circuitry formed on the substrate, the integrated circuitry being circumscribed by the first seal ring, an isolation zone between the seal ring and the integrated circuitry, the isolation zone comprising a set of fin structures, each fin structure facing a same direction.
Public/Granted literature
- US20150255593A1 Finfet Seal Ring Public/Granted day:2015-09-10
Information query
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