Invention Grant
US09437739B2 Finfet seal ring 有权
Finfet密封环

Finfet seal ring
Abstract:
A semiconductor device includes a first front-end-of-line (FEOL) seal ring on a substrate, the seal ring comprising ring-shaped fin-like structures, integrated circuitry formed on the substrate, the integrated circuitry being circumscribed by the first seal ring, an isolation zone between the seal ring and the integrated circuitry, the isolation zone comprising a set of fin structures, each fin structure facing a same direction.
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