Invention Grant
- Patent Title: Semiconductor device and fabrication method thereof
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Application No.: US15012297Application Date: 2016-02-01
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Publication No.: US09437709B2Publication Date: 2016-09-06
- Inventor: De Yuan Xiao
- Applicant: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Applicant Address: CN
- Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee: Semiconductor Manufacturing International (Shanghai) Corporation
- Current Assignee Address: CN
- Agency: Innovation Counsel LLP
- Priority: CN201310327038 20130713
- Main IPC: H01L21/336
- IPC: H01L21/336 ; H01L29/66 ; H01L29/12

Abstract:
A semiconductor device and a method for fabricating the same are disclosed. In the method, a substrate structure is provided, including a substrate and a fin-shaped buffer layer formed on the surface of the substrate. A QW material layer is formed on the surface of the fin-shaped buffer layer. A barrier material layer is formed on the QW material layer. The QW material layer is suitable for forming an electron gas therein. Thereby the short-channel effect is improved, while high mobility of the semiconductor device is guaranteed. In addition, according to the present disclosure, thermal dissipation of the semiconductor device may be improved, and thus performance and stability of the device may be improved.
Public/Granted literature
- US20160149014A1 SEMICONDUCTOR DEVICE AND FABRICATION METHOD THEREOF Public/Granted day:2016-05-26
Information query
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