Invention Grant
- Patent Title: Semiconductor device manufacturing method and semiconductor device
- Patent Title (中): 半导体器件制造方法和半导体器件
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Application No.: US14528241Application Date: 2014-10-30
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Publication No.: US09437598B2Publication Date: 2016-09-06
- Inventor: Hiroyuki Ogawa , Junichi Ariyoshi
- Applicant: FUJITSU SEMICONDUCTOR LIMITED
- Applicant Address: JP Yokohama
- Assignee: FUJITSU SEMICONDUCTOR LIMITED
- Current Assignee: FUJITSU SEMICONDUCTOR LIMITED
- Current Assignee Address: JP Yokohama
- Agency: Westerman, Hattori, Daniels & Adrian, LLP
- Priority: JP2013-231163 20131107
- Main IPC: H01L27/115
- IPC: H01L27/115 ; H01L29/66 ; H01L21/8234 ; H01L29/788 ; H01L27/11

Abstract:
A semiconductor device manufacturing method includes: forming a first well of the first conductivity type in a substrate; forming a second well of the first conductivity type in a first region of the substrate; forming a third well of the second conductivity type underneath the second well in the first region of the substrate in a position overlapping with the first well located underneath the second well in the first region of the substrate; forming a fourth well, that surrounds the second well and has the second conductivity type, in the first region of the substrate; forming a fifth well of the first conductivity type above the first well in the second region of the substrate; and forming a sixth well of the second conductivity type above the first well in the second region of the substrate.
Public/Granted literature
- US20150123187A1 SEMICONDUCTOR DEVICE MANUFACTURING METHOD AND SEMICONDUCTOR DEVICE Public/Granted day:2015-05-07
Information query
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