Invention Grant
US09437597B2 Static random access memory (SRAM) device with FinFET transistors
有权
具有FinFET晶体管的静态随机存取存储器(SRAM)器件
- Patent Title: Static random access memory (SRAM) device with FinFET transistors
- Patent Title (中): 具有FinFET晶体管的静态随机存取存储器(SRAM)器件
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Application No.: US15013902Application Date: 2016-02-02
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Publication No.: US09437597B2Publication Date: 2016-09-06
- Inventor: Mieno Fumitake
- Applicant: Semiconductor Manufacturing International (Shanghai) Corporation
- Applicant Address: CN Shanghai
- Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee: SEMICONDUCTOR MANUFACTURING INTERNATIONAL (SHANGHAI) CORPORATION
- Current Assignee Address: CN Shanghai
- Agency: Anova Law Group, PLLC
- Priority: CN201410172511 20140425
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/092

Abstract:
The present disclosure provides a static memory cell and fabrication method. A first fin part is formed on a semiconductor substrate. An isolation layer is formed to cover a lower portion of sidewalls of the first fin part. A first dummy gate structure is formed across the first fin part. A dielectric layer is formed on the isolation layer. A mask layer is formed on the dielectric layer with a first opening to expose the top surface of the first dummy gate structure. The first dummy gate structure is removed through the first opening to form a first trench exposing the first fin part. A portion of the isolation layer is removed through the first opening to form a second trench exposing a portion of sidewalls of the first fin part below the top surface of the isolation layer. A first gate structure is formed by filling up the first and the second trenches.
Public/Granted literature
- US20160155746A1 STATIC MEMORY CELL Public/Granted day:2016-06-02
Information query
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