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US09437578B2 Stacked IC control through the use of homogenous region 有权
堆叠IC控制通过使用均匀区域

Stacked IC control through the use of homogenous region
Abstract:
A package includes a semiconductor chip. The semiconductor chip includes a substrate, a plurality of dielectric layers underlying the substrate, a dielectric region penetrating through the plurality of dielectric layers, and a metal pad overlapped by the dielectric region. A conductive plug penetrates through the substrate, the dielectric region, and the metal pad.
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