Invention Grant
- Patent Title: Substrate handler
- Patent Title (中): 基板处理程序
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Application No.: US14253502Application Date: 2014-04-15
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Publication No.: US09437467B2Publication Date: 2016-09-06
- Inventor: Troy Palm , Kevin J. Barr , Ralph P. Sowden , Matthew M. Laberge , Andrey Monjoseph , Brian Delsey , Emily Nordick , Richard Sobotka , Chetan Suresh
- Applicant: Rudolph Technologies, Inc.
- Applicant Address: US NJ Flanders
- Assignee: Rudolph Technologies, Inc.
- Current Assignee: Rudolph Technologies, Inc.
- Current Assignee Address: US NJ Flanders
- Agency: Dicke, Billig & Czaja, PLLC
- Main IPC: H01L21/68
- IPC: H01L21/68 ; H01L21/677
Abstract:
A loadport for handling film frames is disclosed. The loadport is modular and substantially compatible with applicable standards regarding modular equipment. In particular, the load port is substantially interchangeable with loadports not adapted for handling film frames. The loadport has a compact shuttle for moving film frames and flexible alignment mechanisms for aligning film frames and cassettes of different configurations.
Public/Granted literature
- US20140314535A1 SUBSTRATE HANDLER Public/Granted day:2014-10-23
Information query
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