Invention Grant
- Patent Title: Multi charged particle beam writing apparatus, and multi charged particle beam writing method
- Patent Title (中): 多带电粒子束写入装置和多带电粒子束写入方法
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Application No.: US14755376Application Date: 2015-06-30
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Publication No.: US09437396B2Publication Date: 2016-09-06
- Inventor: Hironobu Matsumoto
- Applicant: NuFlare Technology, Inc.
- Applicant Address: JP Yokohama
- Assignee: NuFlare Technology, Inc.
- Current Assignee: NuFlare Technology, Inc.
- Current Assignee Address: JP Yokohama
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2013-109839 20130524
- Main IPC: H01J37/20
- IPC: H01J37/20 ; H01J37/24 ; H01J37/317 ; H01J37/04 ; H01J37/30

Abstract:
A multi charged particle beam writing apparatus includes a dose calculation unit to calculate a first dose resolving the resist of the target object, for a first beam of the multiple beams, corresponding to a pattern forming region, in which a pattern is arranged; and to calculate a second dose not resolving the resist, for a second beam of the multiple beams, corresponding to a no-pattern forming region, which surrounds the whole perimeter of the pattern and in which no pattern is arranged, and a deflection control unit to control a plural blankers so that a dose of the first beam is to be the first dose calculated and a dose of the second beam is to be the second dose calculated.
Public/Granted literature
- US20150303029A1 MULTI CHARGED PARTICLE BEAM WRITING APPARATUS, AND MULTI CHARGED PARTICLE BEAM WRITING METHOD Public/Granted day:2015-10-22
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