Invention Grant
US09437396B2 Multi charged particle beam writing apparatus, and multi charged particle beam writing method 有权
多带电粒子束写入装置和多带电粒子束写入方法

Multi charged particle beam writing apparatus, and multi charged particle beam writing method
Abstract:
A multi charged particle beam writing apparatus includes a dose calculation unit to calculate a first dose resolving the resist of the target object, for a first beam of the multiple beams, corresponding to a pattern forming region, in which a pattern is arranged; and to calculate a second dose not resolving the resist, for a second beam of the multiple beams, corresponding to a no-pattern forming region, which surrounds the whole perimeter of the pattern and in which no pattern is arranged, and a deflection control unit to control a plural blankers so that a dose of the first beam is to be the first dose calculated and a dose of the second beam is to be the second dose calculated.
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