Invention Grant
US09437341B2 Method and apparatus for generating high current negative hydrogen ion beam
有权
用于产生大电流负氢离子束的方法和装置
- Patent Title: Method and apparatus for generating high current negative hydrogen ion beam
- Patent Title (中): 用于产生大电流负氢离子束的方法和装置
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Application No.: US13800979Application Date: 2013-03-13
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Publication No.: US09437341B2Publication Date: 2016-09-06
- Inventor: Shengwu Chang
- Applicant: Varian Semiconductor Equipment Associates, Inc.
- Applicant Address: US MA Gloucester
- Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee: Varian Semiconductor Equipment Associates, Inc.
- Current Assignee Address: US MA Gloucester
- Main IPC: G21K5/00
- IPC: G21K5/00 ; H01J27/02 ; H01J37/08 ; H01J37/302 ; H01J37/317

Abstract:
An apparatus to generate negative hydrogen ions includes an ion source operative to generate positive hydrogen ions, a first component to adjust positive molecular hydrogen ion species in the ion source, a second component to adjust extraction voltage for extraction of the positive molecular hydrogen ions from the ion source, and a charge exchange cell comprising charge exchange species to convert the extracted positive molecular hydrogen ions to negative hydrogen ions. The adjusted extraction voltage is effective to generate an ion energy to maximize negative ion current yield in the charge exchange cell based upon a product of extraction efficiency of the positive molecular hydrogen ions and a peak in charge exchange efficiency for converting a species of the positive molecular hydrogen ions to negative hydrogen ions through charge exchange between the extracted hydrogen ions and charge exchange species.
Public/Granted literature
- US20130255577A1 Method and Apparatus for Generating High Current Negative Hydrogen ION Beam Public/Granted day:2013-10-03
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