Invention Grant
- Patent Title: Wynne-Dyson projection lens with reduced susceptibility to UV damage
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Application No.: US14281291Application Date: 2014-05-19
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Publication No.: US09436103B2Publication Date: 2016-09-06
- Inventor: Peiqian Zhao , Emily M. True , Raymond Ellis , Andrew M. Hawryluk
- Applicant: Ultratech, Inc.
- Applicant Address: US CA San Jose
- Assignee: Ultratech, Inc.
- Current Assignee: Ultratech, Inc.
- Current Assignee Address: US CA San Jose
- Agency: Opticus IP Law PLLC
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B17/08

Abstract:
A Wynne-Dyson projection lens for use in an ultraviolet optical lithography system is disclosed, wherein the projection lens is configured to have reduced susceptibility to damage from ultraviolet radiation. The projection lens utilizes lens elements that are made of optical glasses that are resistant to damage from ultraviolet radiation, but that also provide sufficient degrees of freedom to correct aberrations. The glass types used for the lens elements are selected from the group of optical glasses consisting of: fused silica, S-FPL51Y, S-FSL5Y, BSM51Y and BAL15Y.
Public/Granted literature
- US20150331326A1 Wynne-Dyson projection lens with reduced susceptibility to UV damage Public/Granted day:2015-11-19
Information query
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