Invention Grant
- Patent Title: Exposure apparatus and measuring device for a projection lens
- Patent Title (中): 用于投影透镜的曝光装置和测量装置
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Application No.: US13682474Application Date: 2012-11-20
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Publication No.: US09436095B2Publication Date: 2016-09-06
- Inventor: Albrecht Ehrmann , Ulrich Wegmann , Rainer Hoch , Joerg Mallmann , Karl-Heinz Schuster , Ulrich Loering , Toralf Gruner , Bernhard Kneer , Bernhard Geuppert , Franz Sorg , Jens Kugler , Norbert Wabra
- Applicant: Carl Zeiss SMT GmbH
- Applicant Address: DE Oberkochen
- Assignee: Carl Zeiss SMT GmbH
- Current Assignee: Carl Zeiss SMT GmbH
- Current Assignee Address: DE Oberkochen
- Agency: Fish & Richardson P.C.
- Main IPC: G03B27/52
- IPC: G03B27/52 ; G03F7/20

Abstract:
A microlithographic projection exposure apparatus includes a projection lens that is configured for immersion operation. For this purpose an immersion liquid is introduced into an immersion space that is located between a last lens of the projection lens on the image side and a photosensitive layer to be exposed. To reduce fluctuations of refractive index resulting from temperature gradients occurring within the immersion liquid, the projection exposure apparatus includes heat transfer elements that heat or cool partial volumes of the immersion liquid so as to achieve an at least substantially homogenous or at least substantially rotationally symmetric temperature distribution within the immersion liquid.
Public/Granted literature
- US20130120723A1 EXPOSURE APPARATUS AND MEASURING DEVICE FOR A PROJECTION LENS Public/Granted day:2013-05-16
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